Porous Ceramic Vacuum Chuck Table

Porous ceramic itself has numerous pores by the ceramic sintering technology and is used for a vacuum chuck.

Porous ceramic vacuum chuck table. For the porous layer usually alumina ceramic is used for special applications carbon super hard conductive ceramic material can be used. 4 inch porous ceramic stone insert. Vacuum chuck porous ceramic products are most popular in india united states and united kingdom. Porous vacuum chuck porous vacuum chuck the semixicon porous vacuum chuck series are designed for use with thin films and other flat samples.

Ceramic chuck table thursday october 23 2014. We are providing below ceramic chuck table products services. Cylindrical porous chucks push up table porous chucks heater table porous chucks built in heater porous chucks among others. In order to successfully fabricate a good porous chuck it is necessary to choose the right combination of body material shape working temperature and porous material specification features.

There are 169 vacuum chuck porous ceramic suppliers mainly located in asia. The top supplying countries or regions are china malaysia and south korea which supply 91 4 and 3 of vacuum chuck porous ceramic respectively. Electrostatic chuck electrostatic chuck. Ceramic materials alumina al 2 o 3 standard product alumina al 2 o 3 low dielectric loss type alumina al 2 o 3 thermal shock residence type zirconia zro 2 standard product silicon carbide sic standard product silicon nitride si 3 n 4.

Types of porous vacuum chucks. Porous ceramic vacuum chuck table or polishing chuck table supplied to semiconductor industry for silicon wafer dicing or finishing purposes. 1 4 npt vacuum connecting included plug and play ready. It can serve as an air flotation platform widely used in semiconductor panel laser process and non contact linear slide.

Vacuum chuck electrostatic chuck porous chuck phosphor plate phoscera ceramics coating refurbishment. This product is an uniform compact frame high strength good porosity durable absorption excellent quality with high efficiency no pollution high fixing precision. Suitable for semiconductor wafer and mems thin film. Porous ceramic vacuum chuck table made by semixicon the world renowned porous ceramic vacuum chuck maker.

3 5 micron surface finish.